Offering a wide range of unique piezoelectric motors based on ultrasonic standing waves, for advance motion control and automation systems, Nanomotion Inc., recently introduced a family of HR-V and HR-UV Series motors.
From a single element which provides 0.45kg of force to an eight element motor, providing 3.6kg of force, the HR series is capable of driving both linear and rotary stages.
The HR-V vacuum series is rated up to 10-7 Torr and the HR-UV is rated up to 10-10 Torr. According to the company, both configurations are capable of handling bake out and operate without any magnetic field, making them well suited to E-Beam writing and inspection as well as other processes that are sensitive to magnetic fields.
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