CREDIT: PI AMERICAS
Nanometer adjustment precision, wear-free operation, and clean-room compatibility are critical in applications such as super-resolution microscopy, micro-assembly, beam delivery, photonics, and optical metrology, often requiring continuous 24/7 operation. To address these needs, PI, a global leader in precision motion control and nanopositioning, announces fast delivery of its PIHera series of XY piezo flexure nanopositioners with XY travel ranges spanning 50µm to 1,500µm. The PIHera family includes over 60 compact X, Z, and XY nanopositioning stages with absolute-measuring nano-precision capacitive sensors for extreme linearity and repeatability of motion.
Compared to traditional motorized systems that rely on mechanical bearings, flexure-guided piezo positioning stages offer several key benefits: they provide wear-free motion without vibration, achieve virtually unlimited resolution, and respond quickly. The design, which excludes rolling elements, eliminates bearing rumble, thus ensuring the uniformity and straightness/flatness of movement.
Precision for demanding applications
PIHera precision closed-loop XY stages incorporate absolute-measuring direct-metrology capacitance sensors, enabling resolutions down to 0.1 nanometers. These stages feature a compact design optimized through Finite Element Analysis (FEA) for high stiffness and extended operational life. Direct metrology offers greater stability and linearity than inferred metrology feedback with strain-based sensors. The cost-effective nature, only 0.02% deviation from perfect linearity, and optional vacuum compatibility make these compact stages well-suited for applications demanding frictionless, vibration-free, and highly accurate positioning.
PIHera stages can be operated with the E-727 piezo controller that offers advanced motion control capabilities tailored for high-precision nanopositioning applications. Designed with digital servo control and 24-bit resolution, it enables sub-nanometer positioning accuracy and dynamic performance. Its built-in notch filters, and automatic parameter optimization ensure superior stability and responsiveness, even in demanding high-throughput applications. The E-727 supports multiple interfaces – including USB, Ethernet, and SPI – for seamless system integration, and it’s compatible with a range of capacitive, strain gauge, and piezoresistive sensors.
Specifications, datasheet: XY Piezo Stages for Stable Motion and Exceptional Precision
Watch the video: The Piezo Effect: Mechatronics Precision Positioning/Motion Control
Read the blog: Piezo Flexure Actuators and Other Piezo Mechanisms for Precision Motion Control Applications